Vertical Plasma Etching and Cleaning Equipment

It can perform processes such as removal of residue in holes, surface cleaning, roughening, and activation

Introductions

Application Areas

PI Surface Roughening and Cleaning

PCB Desmear and Surface Cleaning

FPC Desmear and Surface Cleaning

Surface Roughening and Cleaning of Electronic Materials

Surface Roughening and Cleaning of COVERLY

Product Features

Special Gas Inlet, Diffusion, and Exhaust System Design

Provides excellent processing uniformity and consistent results

Supports various gases

Fully automatic, simple and easy to operate, with high stability and easy maintenance

Special specification machine can be customized according to customer's requirements

Specification

Machine Size	2510(W)1665(D)2090(H)mm
Vacuum Chamber Dimensions	1340(W)1570(D)1240(H)mm
Effective Electrode Dimensions	25"*44"
Output Power	10KW
Output Frequency	40KHz
Power	380VAC/100A/3PH/50Hz
Loadable Gases	Four Types of Gases (O2,N2,CF4,H2)
Temperature Monitoring System
Chiller
Vacuum Pump
Cart or Trolley

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