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Creating Nano PD06 low pressure plasma cleaner system can be used for surface activation, modification, roughness improvement or cleaning for various materials such as plastics, metals, glasses, textiles, or films.
Features
High-density plasma source, high–efficiency plasma, reduced processing time.
Special patented design of the plasma electrode.
Special release of the gas into the air through the diffusion and exhaust system design.
Good uniformity of treatment.
Good plasma uniformity.
Can use a variety of process gases.
Fully automatic and easy to operate.
Equipment with high stability and easy maintenance.
Designed according to customer demands for special machines with special specifications.
Related solutions
PCB、FPC/PCB, FPC, etc
Improving surface roughness before printing, painting, gluing or bonding.
Items | PD06 |
Size | 2000(W)*2100(D)*2626(H)mm |
Chamber Size | 1100(W)*1480(D)*1220(H)mm |
Chamber material | S.S.chamber & Al door |
Electrode | Water-cooling electrodes |
Capacity | PCB: 28 panels, max. PCB size:20"*24" |
Plasma power supply | 10KWatts |
Mass flow controller | 4 Standard (additional 1 optional) CF4, O2, N2, Ar, H2 |
Pressure gauge | 760~10-3torr |
Vacuum pump | Dry pump + Roots pump |
Water Cooler | |
Process temperature control system | |
Shelf and cart |
